JPH0310531U - - Google Patents
Info
- Publication number
- JPH0310531U JPH0310531U JP7112289U JP7112289U JPH0310531U JP H0310531 U JPH0310531 U JP H0310531U JP 7112289 U JP7112289 U JP 7112289U JP 7112289 U JP7112289 U JP 7112289U JP H0310531 U JPH0310531 U JP H0310531U
- Authority
- JP
- Japan
- Prior art keywords
- laminated
- multilayer wiring
- aluminum layer
- layer obtained
- wiring structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 2
- 238000005566 electron beam evaporation Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7112289U JPH0310531U (en]) | 1989-06-16 | 1989-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7112289U JPH0310531U (en]) | 1989-06-16 | 1989-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0310531U true JPH0310531U (en]) | 1991-01-31 |
Family
ID=31607874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7112289U Pending JPH0310531U (en]) | 1989-06-16 | 1989-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0310531U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016178214A (ja) * | 2015-03-20 | 2016-10-06 | 豊田合成株式会社 | 半導体装置および半導体装置の製造方法 |
-
1989
- 1989-06-16 JP JP7112289U patent/JPH0310531U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016178214A (ja) * | 2015-03-20 | 2016-10-06 | 豊田合成株式会社 | 半導体装置および半導体装置の製造方法 |